Facilities

Our facilities can be booked here.

Equipment


Cleanroom
, Blok H

  • 110 m2 white area cleanroom
  • 200 m2 grey area
  • class 100
  • 1° temperature control
  • 3% relative humidity control
  • max. 4’’ wafer processing


Surface Science laboratory (Blok A, 3rd floor)
Eclipse ME600(Nikon)
Waver probe station
Wire Bonder (Kulicke & Soffa 4700)
Edwards R500 electron beam evaporator
Excimer laser micromanipulation station (ELMS)

Nanooptics laboratory (Basement, below the cleanroom)
Eclipse TE2000-U/laser scanning microscope

Microscopy laboratory (Blok A, 3rd floor)
Atomic Force and inverted microscope (Eclipse TE 300/AFM (JPK))