Wafer probe station

(Rucker & Kolls 666)

Here wafers can be tested for electrical connections of single parts of the wafer. Our probe station is individually designed.

This probe station possesses four probes, which are maintained stable during sample alignment and measurement by a vacuum system. Various electrical characterizations, such as OFET (organic field effect transistor) measurement and four-probe measurements for nanowires, can be operated utilizing a LabVIEW-controlled data acquisition card along with a Stanford Research SR 570 current preamplifier, which enables pA accuracy. Several DC power supplies and voltage amplifiers together with a LabVIEW program ensure an automatic back-and-forth voltage. The rational design and automatic characterization make this probe station system equivalent to a commercial semiconductor parameter analyzer in terms of I-V measurements.